@inproceedings{inproceedings, title = {{The nucleation structure for cracks in AlGaN epitaxial layers}}, publisher = {{Springer Berlin Heidelberg}}, url = {{https://doi.org/10.1007/3-540-31915-8_12 }}, year = {{2005}}, month = {{1}}, author = {{Murray RT and Parbrook PJ and Hill G and Ross IM}}, doi = {{10.1007/3-540-31915-8_12}}, isbn = {{9783540319146}}, pages = {{63-66}}, note = {{Accessed on 2025/06/08}}}